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1. (WO2018081452) HIGH THROUGHPUT, HIGH RESOLUTION OPTICAL METROLOGY FOR REFLECTIVE AND TRANSMISSIVE NANOPHOTONIC DEVICES

Pub. No.:    WO/2018/081452    International Application No.:    PCT/US2017/058573
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Fri Oct 27 01:59:59 CEST 2017
IPC: B82Y 20/00
G01B 11/00
G01N 21/00
Applicants: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM
Inventors: SREENIVASAN, S.V.
GAWLIK, Brian
SINGHAL, Shrawan
Title: HIGH THROUGHPUT, HIGH RESOLUTION OPTICAL METROLOGY FOR REFLECTIVE AND TRANSMISSIVE NANOPHOTONIC DEVICES
Abstract:
The present disclosure relates to optical metrology for nanophotonic devices. A metrology system according to this disclosure includes a sample camera and a reference camera each connected to at least one computer configured with a computer processor and computerized memory. A tunable light source is directed to a nanophotonic device subject to imaging by the sample camera, and a reference light source subject to imaging by the reference camera to record reference lighting parameters in the memory. The computerized memory stores computer readable software commands that gather respective sets of image data from the sample camera and the reference camera to identify at least one nanophotonic property of the nanophotonic device by comparing the respective sets of image data. Examples show metrology for wire grid polarizers and other devices fabricated in wafer scale or roll to roll assemblies