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1. (WO2018081144) PROCESS MODULE(S) INTEGRATED INTO A METROLOGY AND/OR INSPECTION TOOL

Pub. No.:    WO/2018/081144    International Application No.:    PCT/US2017/058113
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Wed Oct 25 01:59:59 CEST 2017
IPC: G01N 21/64
G01N 21/95
G01N 21/01
Applicants: KLA-TENCOR CORPORATION
Inventors: BELL, Bobby R.
Title: PROCESS MODULE(S) INTEGRATED INTO A METROLOGY AND/OR INSPECTION TOOL
Abstract:
Systems and methods for performing one or more processes on a specimen are provided. One system includes a deposition module incorporated into an existing tool configured to perform an inspection and/or metrology process. The deposition module is configured to deposit one or more materials on a specimen prior to the inspection and/or metrology process performed on the specimen. In some embodiments, the system also includes a stripping module incorporated into the existing tool, and the stripping module is configured to remove one or more materials from the specimen subsequent to the inspection and/or metrology process performed on the specimen. The existing tool includes an illumination subsystem configured to direct light having one or more illumination wavelengths to the specimen; a detection subsystem configured to detect light from the specimen; and a computer subsystem configured to determine information for the specimen using output generated by the detection subsystem responsive to the detected light.