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1. (WO2018080764) CORE CONFIGURATION WITH ALTERNATING POSTS FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING SYSTEM

Pub. No.:    WO/2018/080764    International Application No.:    PCT/US2017/055588
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Sat Oct 07 01:59:59 CEST 2017
IPC: H01F 41/04
H01F 27/06
H01F 27/28
Applicants: APPLIED MATERIALS, INC.
Inventors: IRAVANI, Hassan G.
SWEDEK, Boguslaw A.
LIU, Tzu-Yu
XU, Kun
SHEN, Shih-Haur
Title: CORE CONFIGURATION WITH ALTERNATING POSTS FOR IN-SITU ELECTROMAGNETIC INDUCTION MONITORING SYSTEM
Abstract:
An apparatus for chemical mechanical polishing includes a platen having a surface to support a polishing pad and an electromagnetic induction monitoring system to generate a magnetic field to monitor a substrate being polished by the polishing pad. The electromagnetic induction monitoring system includes a core positioned at least partially in the platen and a coil wound around a portion of the core. The core includes a back portion and a multiplicity of posts extending from the back portion in a first direction normal to the surface of the platen. The core and coil are configured such that the multiplicity of posts include a first plurality of posts to provide a first magnetic polarity and a second plurality of posts to provide an opposite second magnetic polarity, and the first plurality of posts and the second plurality of posts are arranged in an alternating pattern.