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1. (WO2018080744) FLEXIBLE EQUIPMENT FRONT END MODULE INTERFACES, ENVIRONMENTALLY-CONTROLLED EQUIPMENT FRONT END MODULES, AND ASSEMBLY METHODS

Pub. No.:    WO/2018/080744    International Application No.:    PCT/US2017/054935
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Wed Oct 04 01:59:59 CEST 2017
IPC: H01L 21/677
H01L 21/67
Applicants: APPLIED MATERIALS, INC
Inventors: VINCENT, Joseph
KUCHAR, Michael
HRUZEK, Dean C.
SOUNDARRAJAN, Vijayabaskar
MADDHERLA, Pandu
WYATT, Adam J.
MCANDREW, Robert M.
Title: FLEXIBLE EQUIPMENT FRONT END MODULE INTERFACES, ENVIRONMENTALLY-CONTROLLED EQUIPMENT FRONT END MODULES, AND ASSEMBLY METHODS
Abstract:
An equipment front end module interface of an equipment front end module including environmental controls. The equipment front end module interface includes a first mounting member configured to couple to a load lock assembly, and a flexible seal coupled to the first mounting member. The flexible seal provides sealing between the equipment front end module and the load lock assembly and also accommodates axial and other misalignment between the load lock assembly and the equipment front end module during assembly. Equipment front end modules including the equipment front end module interface and methods of assembling a load lock assembly to the equipment front end module using the equipment front end module interface are provided, as are other aspects.