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1. (WO2018080147) WASHER IDLER ROLLER AND WAFER CLEANER USING SAME

Pub. No.:    WO/2018/080147    International Application No.:    PCT/KR2017/011799
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Thu Oct 26 01:59:59 CEST 2017
IPC: H01L 21/67
H01L 21/02
H01L 21/304
Applicants: KANG, Gyeong-Tae
강경태
KIM, Yoon-Sik
김윤식
Inventors: KANG, Gyeong-Tae
강경태
HA, In-Boon
하인분
Title: WASHER IDLER ROLLER AND WAFER CLEANER USING SAME
Abstract:
The present invention relates to a washer idler roller and a wafer cleaner using the same and, more specifically, to: a washer idler roller preventing the slipping and hunting of a wafer such that the water can stably rotate, and accurately sensing a rotating state of the wafer such that a washing state of the wafer can be accurately determined; and a wafer cleaner using the same. To this end, the wafer cleaner of semiconductor manufacturing facilities, according to the present invention, comprises: a wafer roller for rotating a wafer; an idler for sensing the rotational force of the wafer; and a brush provided at both sides of the wafer, wherein the idler comprises: a first body rotatably provided; a pair of first guide parts provided in the first body; and a washer idler roller positioned between the first guide parts so as to make contact with the outer circumferential surface of the wafer.