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1. (WO2018079669) TWO-DIMENSIONAL OPTICAL SCANNING MIRROR DEVICE, MANUFACTURING METHOD THEREFOR, TWO-DIMENSIONAL OPTICAL SCANNING DEVICE, AND IMAGE PROJECTION DEVICE

Pub. No.:    WO/2018/079669    International Application No.:    PCT/JP2017/038740
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Fri Oct 27 01:59:59 CEST 2017
IPC: G02B 26/10
B81B 3/00
G02B 26/08
Applicants: NATIONAL UNIVERSITY CORPORATION UNIVERSITY OF FUKUI
国立大学法人福井大学
Inventors: KATSUYAMA, Toshio
勝山 俊夫
ISHIGAMI, Ryoya
石神 龍哉
Title: TWO-DIMENSIONAL OPTICAL SCANNING MIRROR DEVICE, MANUFACTURING METHOD THEREFOR, TWO-DIMENSIONAL OPTICAL SCANNING DEVICE, AND IMAGE PROJECTION DEVICE
Abstract:
The objective of the present invention is to simplify the structure and reduce the size of a mirror movable part in a two-dimensional optical scanning mirror device, a two-dimensional optical scanning device, and an image projection device. A movable mirror part (10) is supported on a substrate so as to enable two-dimensional scanning, a hard magnetic thin film having a magnetization direction in the film plane direction is provided on the movable mirror part (10), and a magnetic field generation device (30) that includes at least an alternating-current magnetic field generation device for driving the movable mirror part is provided. The ratio of the magnetic field generated by the magnetic field generation device to the coercivity of the hard magnetic thin film is 0.2 or less.