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1. (WO2018079484) METHOD FOR PRODUCING OLIGOSILANE AND DEVICE FOR PRODUCING OLIGOSILANE

Pub. No.:    WO/2018/079484    International Application No.:    PCT/JP2017/038181
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Tue Oct 24 01:59:59 CEST 2017
IPC: C01B 33/04
B01D 53/04
B01D 69/00
B01D 71/02
B01J 29/48
Applicants: SHOWA DENKO K.K.
昭和電工株式会社
Inventors: NOMURA, Kiyoshi
埜村 清志
UCHIDA, Hiroshi
内田 博
Title: METHOD FOR PRODUCING OLIGOSILANE AND DEVICE FOR PRODUCING OLIGOSILANE
Abstract:
Provided is a method for producing oligosilane with which the desired oligosilane can be produced more efficiently. The oligosilane-containing reaction mixture fluid obtained by dehydrocondensation of hydrosilane is fed to a membrane separator under specific conditions and brought into contact with an adsorbent under specific conditions.