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1. (WO2018079351) SUBSTRATE GRIPPING HAND AND SUBSTRATE CONVEYING DEVICE COMPRISING SAME

Pub. No.:    WO/2018/079351    International Application No.:    PCT/JP2017/037586
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Wed Oct 18 01:59:59 CEST 2017
IPC: H01L 21/677
B25J 15/00
B65G 49/07
Applicants: KAWASAKI JUKOGYO KABUSHIKI KAISHA
川崎重工業株式会社
Inventors: FUKUSHIMA, Takayuki
福島 崇行
YOSHIDA, Tetsuya
吉田 哲也
KINOSHITA, Shinya
木下 真也
Title: SUBSTRATE GRIPPING HAND AND SUBSTRATE CONVEYING DEVICE COMPRISING SAME
Abstract:
Provided is a substrate gripping hand for gripping a disc-shaped substrate W that comprises: a base plate (11); and guide members (12) which are provided on the base plate (11), and formed in an L-like shape when viewed from the horizontal direction, the guide members (12) each including a horizontal portion (12h) on a proximal end portion of a bottom surface (12b), and being formed so that a first corner portion (12a1), which is a corner portion formed by the bottom surface (12b) and an inner wall surface (12i), is in a curved shape.