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|1. (WO2018079351) SUBSTRATE GRIPPING HAND AND SUBSTRATE CONVEYING DEVICE COMPRISING SAME|
|Applicants:||KAWASAKI JUKOGYO KABUSHIKI KAISHA
|Title:||SUBSTRATE GRIPPING HAND AND SUBSTRATE CONVEYING DEVICE COMPRISING SAME|
Provided is a substrate gripping hand for gripping a disc-shaped substrate W that comprises: a base plate (11); and guide members (12) which are provided on the base plate (11), and formed in an L-like shape when viewed from the horizontal direction, the guide members (12) each including a horizontal portion (12h) on a proximal end portion of a bottom surface (12b), and being formed so that a first corner portion (12a1), which is a corner portion formed by the bottom surface (12b) and an inner wall surface (12i), is in a curved shape.