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1. (WO2018079350) TFT SUBSTRATE, SCANNING ANTENNA PROVIDED WITH TFT SUBSTRATE AND METHOD FOR PRODUCING TFT SUBSTRATE

Pub. No.:    WO/2018/079350    International Application No.:    PCT/JP2017/037578
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Wed Oct 18 01:59:59 CEST 2017
IPC: H01L 29/786
H01L 21/336
H01Q 3/36
H01Q 3/44
H01Q 13/22
Applicants: SHARP KABUSHIKI KAISHA
シャープ株式会社
Inventors: MISAKI Katsunori
美崎 克紀
Title: TFT SUBSTRATE, SCANNING ANTENNA PROVIDED WITH TFT SUBSTRATE AND METHOD FOR PRODUCING TFT SUBSTRATE
Abstract:
This TFT substrate (105) is provided with: a gate metal layer (3) which comprises a gate electrode (3G) and a patch electrode (3PE) of a TFT (10); a gate insulating layer (4) which is formed on the gate metal layer and has a first opening (4a) that reaches the patch electrode; a source metal layer (7) which is formed on the gate insulating layer and comprises a source electrode (7S), a drain electrode (7D) and a drain extension part (7de) extended from the drain electrode of the TFT; an interlayer insulating layer (11) which is formed on the source metal layer and has a second opening (11a) that overlaps the first opening when viewed from the normal direction of a dielectric substrate (1) and a third opening (11b) that reaches the drain extension part; and a conductive layer (19) which is formed on the interlayer insulating layer and comprises a patch-drain connection part (19a). The patch-drain connection part is in contact with the patch electrode within the first opening, while being in contact with the drain extension part within the third opening.