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1. (WO2018078731) HARD COATING AND MEMBER COATED WITH HARD COATING

Pub. No.:    WO/2018/078731    International Application No.:    PCT/JP2016/081647
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Wed Oct 26 01:59:59 CEST 2016
IPC: C23C 14/06
Applicants: OSG CORPORATION
オーエスジー株式会社
Inventors: SAKURAI Masatoshi
櫻井 正俊
WANG Mei
ワン メイ
Title: HARD COATING AND MEMBER COATED WITH HARD COATING
Abstract:
Provided is a hard coating 24, which is coated on the surface of a tool substrate, and in which an A layer 34, a B layer 36, and a nanoscale alternating layer 40 are alternately laminated to a film thickness of 0.5-20 μm by physical vapor deposition, wherein the nanoscale alternating layer 40 is obtained by alternately laminating a C layer 39 and a nanoscale A layer 37 or nanoscale B layer 38 to nano-order thicknesses, the nanoscale A layer 37 or nanoscale B layer 38 having the same composition as the A layer 34 or B layer 36. The A layer 34 has a compositional formula of (AlaTibCrcαd)N and a thickness of 0.5-1000 nm, the B layer 36 has a compositional formula of (AleTifCrgβh)CXN1-X, and a thickness of 0.5-1000 nm, the nanoscale alternating layer 40 has a thickness of 1-1000 nm, the C layer 39 has a compositional formula of [AliCrj(SiC)kγl]CYN1-Y, and the C layer 39 and the nanoscale A layer 37 or nanoscale B layer have a thickness of 0.5-500 nm.