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1. (WO2018078731) HARD COATING AND MEMBER COATED WITH HARD COATING
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Pub. No.: WO/2018/078731 International Application No.: PCT/JP2016/081647
Publication Date: 03.05.2018 International Filing Date: 25.10.2016
IPC:
C23C 14/06 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
Applicants:
オーエスジー株式会社 OSG CORPORATION [JP/JP]; 愛知県豊川市本野ヶ原三丁目22番地 22, Honnogahara 3-chome, Toyokawa-shi, Aichi 4420005, JP
Inventors:
櫻井 正俊 SAKURAI Masatoshi; JP
ワン メイ WANG Mei; JP
Agent:
池田 治幸 IKEDA Haruyuki; JP
池田 光治郎 IKEDA Kojiro; JP
Priority Data:
Title (EN) HARD COATING AND MEMBER COATED WITH HARD COATING
(FR) REVÊTEMENT DUR ET ÉLÉMENT REVÊTU D'UN REVÊTEMENT DUR
(JA) 硬質被膜および硬質被膜被覆部材
Abstract:
(EN) Provided is a hard coating 24, which is coated on the surface of a tool substrate, and in which an A layer 34, a B layer 36, and a nanoscale alternating layer 40 are alternately laminated to a film thickness of 0.5-20 μm by physical vapor deposition, wherein the nanoscale alternating layer 40 is obtained by alternately laminating a C layer 39 and a nanoscale A layer 37 or nanoscale B layer 38 to nano-order thicknesses, the nanoscale A layer 37 or nanoscale B layer 38 having the same composition as the A layer 34 or B layer 36. The A layer 34 has a compositional formula of (AlaTibCrcαd)N and a thickness of 0.5-1000 nm, the B layer 36 has a compositional formula of (AleTifCrgβh)CXN1-X, and a thickness of 0.5-1000 nm, the nanoscale alternating layer 40 has a thickness of 1-1000 nm, the C layer 39 has a compositional formula of [AliCrj(SiC)kγl]CYN1-Y, and the C layer 39 and the nanoscale A layer 37 or nanoscale B layer have a thickness of 0.5-500 nm.
(FR) L'invention concerne un revêtement dur 24, qui est appliqué sur la surface d'un substrat d'outil, et comprend une couche A 34, une couche B 36, et une nanocouche alternée 40 qui sont stratifiées en alternance à une épaisseur de film de 0,5 à 20 µm par dépôt physique en phase vapeur, la nanocouche alternée 40 étant obtenue par stratification alternée d'une couche C 39 et d'une nanocouche A 37 ou d'une nanocouche B 38 à des épaisseurs nanométriques, la nanocouche A 37 ou la nanocouche B 38 ayant la même composition que la couche A 34 ou la couche B 36. La couche A 34 a la formule de composition (AlaTibCrcαd)N et une épaisseur de 0,5 à 1 000 nm, la couche B 36 a la formule de composition (AleTifCrgβh)CXN1-X, et une épaisseur de 0,5 à 1 000 nm, la nanocouche alternée 40 a une épaisseur de 1 à 1 000 nm, la couche C 39 a la formule de composition [AliCrj(SiC)kγl]CYN1-Y, et la couche C 39 et la nanocouche A 37 ou la nanocouche B ont une épaisseur de 0,5 à 500 nm.
(JA) 工具母材30の表面に被覆される硬質被膜24は、物理的蒸着法により、A層34と、B層36と、A層34またはB層36と同一の組成を有するナノレイヤーA層37またはナノレイヤーB層38およびC層39がナノオーダの厚みで交互に積層されたナノレイヤー交互層40とが交互に積層されて、0.5~20μmの膜厚となるように構成されたものであり、A層34は、組成式が(AlTiCrα)Nであり、0.5~1000nmの厚みを有し、B層36は、組成式が(AlTiCrβ)C1-Xであり、0.5~1000nmの厚みを有し、ナノレイヤー交互層40は1~1000nmの厚みを有するものであり、C層39は、組成式が[AlCr(SiC)γ]C1-Yであり、ナノレイヤーA層37またはナノレイヤーB層38およびC層39は0.5~500nmの厚みを有する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)