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1. (WO2018077873) SYSTEM AND METHOD FOR DETERMINING AND CALIBRATING A POSITION OF A STAGE

Pub. No.:    WO/2018/077873    International Application No.:    PCT/EP2017/077155
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Wed Oct 25 01:59:59 CEST 2017
IPC: H01J 37/20
G03F 7/20
Applicants: ASML NETHERLANDS B.V.
HERMES MICROVISION, INC.
Inventors: WANG, Youjin
LI, Fangfu
Title: SYSTEM AND METHOD FOR DETERMINING AND CALIBRATING A POSITION OF A STAGE
Abstract:
System and method for dynamically determining a position of stage (200) holding a sample and automatically compensating position errors comprising a plurality of interferometer units (31, 32) configured to generate signals based on a position of a stage and further comprising a computing device which can be configured to determine the position of the sample based on the signals, and in response to the determined position, provide instructions associated with the determined position by a control module for controlling of a motor of a stage, or for controlling of a motor to adjust interferometer units emitting charged particle beams, or combination thereof, to compensate position errors of a sample automatically.