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1. (WO2018077754) DEVICE FOR PRODUCING AN ATMOSPHERIC PRESSURE PLASMA
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Pub. No.: WO/2018/077754 International Application No.: PCT/EP2017/076891
Publication Date: 03.05.2018 International Filing Date: 20.10.2017
IPC:
H01L 41/107 (2006.01) ,H01L 41/053 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08
Piezo-electric or electrostrictive elements
107
with electrical input and electrical output
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02
Details
04
of piezo-electric or electrostrictive elements
053
Mounts, supports, enclosures or casings
Applicants:
EPCOS AG [DE/DE]; Rosenheimer Str. 141e 81671 Munich, DE
Inventors:
RINNER, Franz; AT
KUDELA, Pavol; AT
PUFF, Markus; AT
Agent:
EPPING HERMANN FISCHER PATENTANWALTSGESELLSCHAFT MBH; Schloßschmidstr. 5 80639 München, DE
Priority Data:
10 2016 120 324.625.10.2016DE
Title (EN) DEVICE FOR PRODUCING AN ATMOSPHERIC PRESSURE PLASMA
(FR) DISPOSITIF DE PRODUCTION D'UN PLASMA À LA PRESSION ATMOSPHÉRIQUE
(DE) VORRICHTUNG ZUR ERZEUGUNG EINES ATMOSPHÄRENDRUCK-PLASMAS
Abstract:
(EN) The invention relates to a device (11) for producing an atmospheric pressure plasma, comprising a piezoelectric transformer (1) and a first supporting element (22) on which the piezoelectric transformer (1) rests in a position in which an oscillation nodal point forms when the piezoelectric transformer (1) is operated at an operating frequency that is smaller than its parallel resonant frequency, and the piezoelectric transformer (1) is used for producing a non-thermal atmospheric pressure plasma.
(FR) L'invention concerne un dispositif (11) pour la production d'un plasma à la pression atmosphérique. Le dispositif comprend un transformateur piézoélectrique (1) et un premier élément de support (22), sur lequel le transformateur piézoélectrique (1) repose dans une position dans laquelle un nœud de vibration se forme lorsque le transformateur piézoélectrique (1) fonctionne à une fréquence de fonctionnement qui est inférieure à sa fréquence de résonance parallèle, et le transformateur piézoélectrique (1) est utilisé pour produire un plasma non thermique à la pression atmosphérique.
(DE) Die vorliegende Erfindung betrifft eine Vorrichtung (11) zur Erzeugung eines Atmosphärendruck-Plasmas, aufweisend einen piezoelektrischen Transformator (1) und ein erstes Stützelement (22), auf dem der piezoelektrische Transformator (1) an einer Position aufliegt, an der sich ein Schwingungsknoten ausbildet, wenn der piezoelektrische Transformator (1) mit einer Betriebsfrequenz betrieben wird, die kleiner ist als seine Parallelresonanzfrequenz, und der piezoelektrische Transformator (1) zur Erzeugung eines nicht-thermischen Atmosphärendruck-Plasmas verwendet wird.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)