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1. (WO2018077605) APPARATUS TO MOVE AN OBJECT IN AND/OR OUT OF A HOUSING

Pub. No.:    WO/2018/077605    International Application No.:    PCT/EP2017/075679
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Tue Oct 10 01:59:59 CEST 2017
IPC: G03F 7/20
Applicants: ASML NETHERLANDS B.V.
Inventors: VAN BAKEL, Marc, Cornelis, Pieter
VAN OYEN, Gabriëlle
Title: APPARATUS TO MOVE AN OBJECT IN AND/OR OUT OF A HOUSING
Abstract:
An apparatus (900) is provided for moving an object (300) in and/or out of a housing, for example a support structure for a mask out of a housing of a lithographic apparatus. The apparatus comprises a first guiding mechanism (400) moveable in a first direction and which is rotatably connectable to a first part of the object, and a second guiding mechanism (500) moveable in a second direction and which is rotatably connectable to a second part of the object, wherein the second part is different from the first part and the second direction is different from the first direction. The rotatable connections define a rotation around an axis which extends in a third direction which is substantially perpendicular to the first direction and the second direction.