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1. (WO2018077471) CHARGED-PARTICLE MONITORING APPARATUS, ELECTRON MICROSCOPE AND METHOD FOR DETECTION OF CHARGED-PARTICLES

Pub. No.:    WO/2018/077471    International Application No.:    PCT/EP2017/001242
Publication Date: Fri May 04 01:59:59 CEST 2018 International Filing Date: Wed Oct 25 01:59:59 CEST 2017
IPC: H01J 37/26
H01J 37/22
H01J 37/04
Applicants: BAUM, Peter
Inventors: BAUM, Peter
Title: CHARGED-PARTICLE MONITORING APPARATUS, ELECTRON MICROSCOPE AND METHOD FOR DETECTION OF CHARGED-PARTICLES
Abstract:
Charged-particle monitoring apparatus and method, wherein at a beam modulation member a continuous beam of charged particles and a continuous laser beam are intersected thereby particle pulses are produced which are shorter than an optical cycle, while the beam quality and average current of the particle beam are preserved.