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|1. (WO2018077065) THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREFOR, AND ARRAY SUBSTRATE AND DISPLAY PANEL|
|Applicants:||BOE TECHNOLOGY GROUP CO., LTD.
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
|Title:||THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREFOR, AND ARRAY SUBSTRATE AND DISPLAY PANEL|
Disclosed are a thin film transistor and a manufacturing method therefor, and an array substrate and a display panel. The manufacturing method comprises: successively forming a semiconductor film containing metal elements, an etch-stopper film and source and drain electrode films on a base substrate; and using the same mask plate to form patterns comprising an active layer, an etch-stopper layer, and a source electrode and a drain electrode on the active layer, wherein the etch-stopper layer is configured to electrically connect the source electrode and the drain electrode to the active layer. Since an etch-stopper film is formed on a semiconductor film containing metal elements, in a pattern forming process, the etch-stopper film can protect the semiconductor film containing the metal elements against etching, thereby guaranteeing the performance of a formed active layer.