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1. WO2018072766 - APPARATUS FOR SPECTRUM AND INTENSITY PROFILE CHARACTERIZATION OF A BEAM, USE THEREOF AND METHOD THEREOF

Publication Number WO/2018/072766
Publication Date 26.04.2018
International Application No. PCT/CZ2017/050050
International Filing Date 21.10.2017
IPC
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
1
Photometry, e.g. photographic exposure meter
42
using electric radiation detectors
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3
Spectrometry; Spectrophotometry; Monochromators; Measuring colours
12
Generating the spectrum; Monochromators
18
using diffraction elements, e.g. grating
G PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
3
Spectrometry; Spectrophotometry; Monochromators; Measuring colours
02
Details
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
23
Investigating or analysing materials by the use of wave or particle radiation not covered by group G01N21/ or G01N22/159
20
by using diffraction of the radiation, e.g. for investigating crystal structure; by using reflection of the radiation
G01J 1/42 (2006.01)
G01J 3/18 (2006.01)
G01J 3/02 (2006.01)
G01N 23/20 (2018.01)
CPC
G01J 1/4257
G01J 1/429
G01J 2003/1847
G01J 3/021
G01J 3/0237
G01J 3/0262
Applicants
  • FYZIKALNI USTAV AV CR, V.V.I. [CZ/CZ]; Na Slovance 1999/2 18221 Praha 8, CZ
Inventors
  • NEJDL, Jaroslav; CZ
Priority Data
PV 2016-66121.10.2016CZ
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) APPARATUS FOR SPECTRUM AND INTENSITY PROFILE CHARACTERIZATION OF A BEAM, USE THEREOF AND METHOD THEREOF
(FR) APPAREIL DE CARACTÉRISATION DE PROFIL SPECTRAL ET D’INTENSITÉ D’UN FAISCEAU, UTILISATION ASSOCIÉE ET PROCÉDÉ ASSOCIÉ
Abstract
(EN)
The present invention concerns an apparatus for spectral and intensity profile characterization comprising: a diffractive element; a beam block (3) attached to the diffractive element, the beam block (3) being positioned so as to block the passage of the direct incoming beam (1) which is not incident on the diffractive element; a device for translation of the beam block (3) and the diffractive element; reflective element (4); fixed detector (5) positioned on the axis of the incoming beam (1). The invention also concerns use and a method thereof. Such a compact system provides application in the field of spectrometry and diagnostics of the beam intensity profile, especially in the area of XUV and soft X-rays.
(FR)
La présente invention concerne un appareil de caractérisation de profil spectral et d’intensité comprenant : un élément diffractif ; un bloc de faisceau (3) fixé à l’élément diffractif, le bloc de faisceau (3) étant positionné de façon à bloquer le passage du faisceau entrant direct (1) qui n’est pas incident sur l’élément diffractif ; un dispositif de translation du bloc de faisceau (3) et de l’élément diffractif ; un élément réfléchissant (4) ; un détecteur fixe (5) positionné sur l’axe du faisceau entrant (1). L’invention concerne en outre une utilisation et un procédé associés. Un tel système compact produit une application dans le domaine de la spectrométrie et des diagnostics du profil d’intensité du faisceau, en particulier dans la région X-UV et des rayons X mous.
Also published as
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