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1. (WO2018067243) EXPEDITING SPECTRAL MEASUREMENT IN SEMICONDUCTOR DEVICE FABRICATION
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2018/067243    International Application No.:    PCT/US2017/048276
Publication Date: 12.04.2018 International Filing Date: 23.08.2017
IPC:
H01L 21/66 (2006.01), H01L 21/67 (2006.01)
Applicants: KLA-TENCOR CORPORATION [US/US]; Legal Department One Technology Drive Milpitas, California 95035 (US)
Inventors: IMMER, Vincent; (IL).
MARCIANO, Tal; (IL).
LAVERT, Etay; (IL)
Agent: MCANDREWS, Kevin; (US).
MORRIS, Elizabeth M. N.; (US)
Priority Data:
62/403,712 04.10.2016 US
Title (EN) EXPEDITING SPECTRAL MEASUREMENT IN SEMICONDUCTOR DEVICE FABRICATION
(FR) ACCÉLÉRATION DE LA MESURE SPECTRALE DANS LA FABRICATION DE DISPOSITIFS À SEMI-CONDUCTEURS
Abstract: front page image
(EN)A device and method for expediting spectral measurement in metrological activities during semiconductor device fabrication through interferometric spectroscopy of white light illumination during calibration, overlay, and recipe creation.
(FR)L'invention concerne un dispositif et un procédé pour accélérer une mesure spectrale dans des activités métrologiques pendant la fabrication d'un dispositif à semi-conducteur par spectroscopie interférométrique d'éclairage de lumière blanche pendant l'étalonnage, le recouvrement et la création de recette.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)