WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2018066884) METHOD FOR PREPARING COMPOSITE MEMBRANE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2018/066884    International Application No.:    PCT/KR2017/010779
Publication Date: 12.04.2018 International Filing Date: 28.09.2017
IPC:
H01L 21/033 (2006.01), H01L 21/768 (2006.01), H01L 21/02 (2006.01), H01L 21/28 (2006.01), H01L 21/324 (2006.01)
Applicants: WONIK IPS CO., LTD. [KR/KR]; 75, Jinwisandan-ro, Jinwi-myeon Pyeongtaek-si Gyeonggi-do 17709 (KR)
Inventors: YI, In Hwan; (KR).
JIN, Kwang Seon; (KR).
CHO, Byung Chul; (KR).
CHUN, Jin Sung; (KR)
Agent: KIM, Seong Nam; (KR)
Priority Data:
10-2016-0129049 06.10.2016 KR
10-2016-0145752 03.11.2016 KR
10-2017-0122362 22.09.2017 KR
Title (EN) METHOD FOR PREPARING COMPOSITE MEMBRANE
(FR) PROCÉDÉ DE PRÉPARATION DE MEMBRANE COMPOSITE
(KO) 복합막 제조방법
Abstract: front page image
(EN)The present technique relates to a method for preparing a composite membrane. In the method for preparing a composite membrane according to the present embodiment, a first material layer, which is composed of at least one layer, is deposited by using a first source gas containing a first component and a reaction gas containing oxygen reacting with the first source gas. A second material layer, which is composed of at least one layer, is deposited on the first material layer by using a second source gas containing a second component different from the first component and a reaction gas containing oxygen reacting with the second source gas. A step for depositing the first material layer and a step for depositing the second material layer are set to one cycle, and the cycle is performed at least once.
(FR)La présente technique concerne un procédé de préparation d'une membrane composite. Dans le procédé de préparation d'une membrane composite selon le présent mode de réalisation, une première couche de matériau, qui est composée d'au moins une couche, est déposée en utilisant un premier gaz source contenant un premier composant et un gaz de réaction contenant de l'oxygène réagissant avec le premier gaz source. Une seconde couche de matériau, qui est composée d'au moins une couche, est déposée sur la première couche de matériau en utilisant un second gaz source contenant un second composant différent du premier composant et un gaz de réaction contenant de l'oxygène réagissant avec le second gaz source. Une étape de dépôt de la première couche de matériau et une étape de dépôt de la seconde couche de matériau sont définies en un cycle, et le cycle est effectué au moins une fois.
(KO)복합막 제조방법에 관한 기술이다. 본 실시예에 따른 복합막 제조방법은, 적어도 한 층 이상으로 구성되는 제 1 성분을 포함하는 제 1 소스 가스 및 상기 제 1 소스 가스와 반응하는 산소를 포함하는 반응 가스를 이용하여 제 1 물질층을 증착한다. 상기 제 1 물질층 상부에 적어도 한 층 이상으로 구성되며, 제 1 성분과 상이한 제 2 성분을 포함하는 제 2 소스 가스 및 상기 제 2 소스 가스와 반응하는 산소를 포함하는 반응 가스를 이용하여 제 2 물질층을 증착한다. 상기 제 1 물질층을 증착하는 단계 및 상기 제 2 물질층을 증착하는 단계를 1개의 사이클로 설정하고, 상기 사이클을 적어도 1회 이상 진행한다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)