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1. (WO2018066852) SUBSTRATE INSPECTION DEVICE AND SUBSTRATE DISTORTION COMPENSATING METHOD USING SAME
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Pub. No.: WO/2018/066852 International Application No.: PCT/KR2017/010507
Publication Date: 12.04.2018 International Filing Date: 22.09.2017
IPC:
H05K 13/08 (2006.01) ,G01B 11/24 (2006.01)
H ELECTRICITY
05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
K
PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
13
Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
08
Monitoring manufacture of assemblages
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
24
for measuring contours or curvatures
Applicants:
주식회사 고영테크놀러지 KOH YOUNG TECHNOLOGY INC. [KR/KR]; 서울시 금천구 가산디지털2로 53, 14층-15층 (가산동, 한라시그마밸리) (Halla Sigma Valley, Gasan-dong) F14-15, 53, Gasan digital 2-ro Geumcheon-gu Seoul 08588, KR
Inventors:
정승원 JUNG, Seung Won; KR
최종진 CHOI, Jong Jin; KR
Agent:
특허법인청맥 C.M. PATENT & LAW FIRM, LLP.; 서울시 강남구 테헤란로25길 39, 2층 (역삼동, MK빌딩) (MK Bldg., Yeoksam-dong) 2F, 39, Teheran-ro 25-gil Gangnam-gu Seoul 06131, KR
Priority Data:
10-2016-012735004.10.2016KR
Title (EN) SUBSTRATE INSPECTION DEVICE AND SUBSTRATE DISTORTION COMPENSATING METHOD USING SAME
(FR) DISPOSITIF D'INSPECTION DE SUBSTRAT ET PROCÉDÉ DE COMPENSATION DE DISTORSION DE SUBSTRAT L'UTILISANT
(KO) 기판 검사장치 및 이를 이용한 기판의 왜곡 보상 방법
Abstract:
(EN) A substrate inspection device comprises a measurement unit, a processing unit, and a display unit, wherein: the measurement unit acquires measurement data on at least a part of a substrate; the processing unit compares the measurement data of the substrate with reference data of the substrate on the basis of a plurality of selection characteristic objects, compares the selection characteristic objects corresponding to each other so as to compensate for distortion of the substrate, and inspects the substrate for which distortion has been compensated; the display unit displays a first area, which is an area in which the distortion compensation was successful, and a second area, in which the distortion compensation has failed, so as to distinguish the first and second areas from each other; and the processing unit compares the number of recognizable valid characteristic objects with the reference number thereof and determines that the distortion compensation has failed if the number of recognizable valid characteristic objects is less than the reference number thereof. Therefore, user convenience can be improved and a user can easily recover from a failure of the distortion compensation, and distortion can be accurately and effectively compensated for.
(FR) Un dispositif d'inspection de substrat comprend une unité de mesure, une unité de traitement et une unité d'affichage, l'unité de mesure acquérant des données de mesure sur au moins une partie d'un substrat ; l'unité de traitement comparant les données de mesure du substrat avec des données de référence du substrat sur la base d'une pluralité d'objets caractéristiques de sélection, comparant les objets caractéristiques de sélection correspondant les uns aux autres de façon à compenser une distorsion du substrat, et inspectant le substrat pour lequel une distorsion a été compensée ; l'unité d'affichage affichant une première zone, qui est une zone dans laquelle la compensation de distorsion a été réussie, et une seconde zone, dans laquelle la compensation de distorsion a échoué, de façon à distinguer les première et seconde zones l'une de l'autre ; et l'unité de traitement comparant le nombre d'objets caractéristiques valides reconnaissables avec leur nombre de référence et déterminant que la compensation de distorsion a échoué si le nombre d'objets caractéristiques valides reconnaissables est inférieur à leur nombre de référence. Par conséquent, la commodité pour l'utilisateur peut être améliorée et un utilisateur peut facilement surmonter une défaillance de la compensation de distorsion, et une distorsion peut être compensée de manière précise et efficace.
(KO) 기판 검사장치는 측정부, 처리부 및 디스플레이부를 포함한다. 측정부는 기판의 적어도 일부에 대한 측정 데이터를 획득한다. 처리부는 복수의 선정특징객체들을 기초로 기판의 측정 데이터 및 기판의 기준 데이터를 비교하되, 서로 대응되는 선정특징객체들끼리 서로 비교하여, 기판의 왜곡 보상을 수행하고, 왜곡이 보상된 기판을 검사한다. 디스플레이부는 왜곡 보상이 성공한 영역인 제1 영역과 왜곡 보상이 실패한 영역인 제2 영역을 서로 구별되게 디스플레이한다. 처리부는, 인식 가능한 유효특징객체들의 개수를 기준 개수와 비교하여, 인식 가능한 유효특징객체들의 개수가 기준 개수 미만인 경우 왜곡 보상이 실패한 것으로 판정한다. 이에 따라, 사용자의 편의성을 향상시킬 수 있고, 사용자가 용이하게 왜곡 보상의 실패를 만회할 수 있으며, 정확하고 유효한 왜곡 보상을 가능하게 할 수 있다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)