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1. (WO2018066698) SHAPE MEASURING DEVICE AND METHOD

Pub. No.:    WO/2018/066698    International Application No.:    PCT/JP2017/036510
Publication Date: Fri Apr 13 01:59:59 CEST 2018 International Filing Date: Sat Oct 07 01:59:59 CEST 2017
IPC: G01B 11/24
Applicants: INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION RESEARCH ORGANIZATION OF INFORMATION AND SYSTEMS
大学共同利用機関法人情報・システム研究機構
Inventors: SATO, Imari
佐藤 いまり
ASANO, Yuta
浅野 祐太
ZHENG, Yinqiang
鄭 銀強
NISHINO, Ko
西野 恒
Title: SHAPE MEASURING DEVICE AND METHOD
Abstract:
This shape measuring device is provided with: a light source which radiates light having first and second wavelengths onto the surface of an object having reflectance factors with respect to the first and second wavelengths, via a medium having absorption coefficients at the first and second wavelengths; a sensor which receives light that has come from the surface of the object and has propagated through the medium, and which measures the intensities at the first and second wavelengths; and a measuring unit which calculates the distance from the surface of the medium to the surface of the object on the basis of the measured intensities at the first and second wavelengths, and on the basis of the absorption coefficients at the first and second wavelengths, and measures the shape of the object on the basis of the calculated distance. The first and second wavelengths are selected such that a difference between the intensity for a minimum distance at the first wavelength and the intensity for a maximum distance at the second wavelength is greater than a prescribed first value, and such that a difference between the reflectance factor at the first wavelength and the reflectance factor at the second wavelength is smaller than a prescribed second value.