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1. (WO2018066359) EXAMINATION DEVICE, EXAMINATION METHOD, COMPUTER PROGRAM, AND RECORDING MEDIUM
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2018/066359    International Application No.:    PCT/JP2017/033947
Publication Date: 12.04.2018 International Filing Date: 20.09.2017
IPC:
G01B 11/00 (2006.01), G01B 11/06 (2006.01), G01B 15/02 (2006.01), G01N 21/3581 (2014.01)
Applicants: PIONEER CORPORATION [JP/JP]; 28-8, Honkomagome 2-chome, Bunkyo-ku, Tokyo 1130021 (JP)
Inventors: OCHIAI, Takanori; (JP).
OGASAWARA, Masakazu; (JP)
Agent: EGAMI, Tatsuo; (JP).
NAKAMURA, Toshinobu; (JP)
Priority Data:
2016-198971 07.10.2016 JP
Title (EN) EXAMINATION DEVICE, EXAMINATION METHOD, COMPUTER PROGRAM, AND RECORDING MEDIUM
(FR) DISPOSITIF D'EXAMEN, PROCÉDÉ D'EXAMEN, PROGRAMME D'ORDINATEUR ET SUPPORT D'ENREGISTREMENT
(JA) 検査装置、検査方法、コンピュータプログラム及び記録媒体
Abstract: front page image
(EN)This examination device 100 is provided with: an irradiation unit 110 which irradiates a sample S having a plurality of layers L with terahertz waves THz; a detection unit 130 which detects the terahertz waves from the sample and acquires a detection waveform DW; and an estimation unit 1523 which, on the basis of the degree a of clarity of the detection waveform, the detection waveform, and a library 1522a indicating estimation waveforms EW of terahertz waves, estimates the positions of boundary surfaces B1, B2.
(FR)L'invention concerne un dispositif d'examen (100) pourvu : d'une unité d'irradiation (110) qui soumet un échantillon S comportant une pluralité de couches L à des ondes térahertz THz ; d'une unité de détection (130) qui détecte les ondes térahertz à partir de l'échantillon et qui acquiert une forme d'onde de détection DW ; et d'une unité d'estimation (1523) qui, sur la base du degré a de clarté de la forme d'onde de détection, de la forme d'onde de détection et d'une bibliothèque (1522a) indiquant des formes d'ondes d'estimation EW d'ondes térahertz, estime les positions de surfaces limites B1, B2.
(JA)検査装置100は、複数の層Lが積層された試料Sにテラヘルツ波THzを照射する照射部110と、試料からのテラヘルツ波を検出して検出波形DWを取得する検出部130と、検出波形の明瞭度a、検出波形及びテラヘルツ波の推定波形EWを示すライブラリ1522aに基づいて、界面B1及びB2の位置を推定する推定部1523とを備える。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)