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1. (WO2018066302) FIRST PROTECTION FILM FORMING SHEET

Pub. No.:    WO/2018/066302    International Application No.:    PCT/JP2017/032468
Publication Date: Fri Apr 13 01:59:59 CEST 2018 International Filing Date: Sat Sep 09 01:59:59 CEST 2017
IPC: H01L 21/304
H01L 21/301
Applicants: LINTEC CORPORATION
リンテック株式会社
Inventors: YAMAGISHI Masanori
山岸 正憲
ADACHI Issei
安達 一政
Title: FIRST PROTECTION FILM FORMING SHEET
Abstract:
This first protection film forming sheet is provided with a first base material, a buffer layer formed on the first base material, and a curable resin film formed on the buffer layer. When test pieces for each of the buffer layer and the curable resin film are fabricated having a diameter of 8 mm and a thickness of 1 mm, and a strain distribution measurement is performed to measure the shearing modulus G' of the test pieces by producing a strain in the test pieces under conditions of 90°C and 1 Hz, a shearing modulus Gb300' of the test piece for the buffer layer when the test piece for the buffer layer has a strain of 300%, and a shearing modulus Gc300' of the test piece for the curable resin film when the test piece for the curable resin film has a strain of 300% satisfy the relationship Gb300' ≥ Gc300'.