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1. (WO2018065755) INFRARED EMITTER OR DETECTOR HAVING ENHANCED EMISSIVITY AND/OR SENSITIVITY AT TWO OR MORE DIFFERENT WAVELENGTHS

Pub. No.:    WO/2018/065755    International Application No.:    PCT/GB2017/052907
Publication Date: Fri Apr 13 01:59:59 CEST 2018 International Filing Date: Fri Sep 29 01:59:59 CEST 2017
IPC: G01J 5/12
H01L 33/34
G01J 5/08
Applicants: THE UNIVERSITY OF WARWICK
Inventors: GARDNER, Julian
URASINSKA-WOJCIK, Barbara
XING, Yuxin
Title: INFRARED EMITTER OR DETECTOR HAVING ENHANCED EMISSIVITY AND/OR SENSITIVITY AT TWO OR MORE DIFFERENT WAVELENGTHS
Abstract:
An infrared device is disclosed. The infrared device comprises a silicon substrate (3) and a membrane (8) supported by the silicon substrate. The membrane (8) includes a stack of at least two layers (101, 102,103, 104) of dielectric material and at least one patterned layer (141, 142) of conductive material, each patterned layer interposed between a respective adjacent layers of dielectric material in the stack. The at least one patterned layer of conductive material comprises laterally-spaced apart regions (151, 152) of the conductive material, the regions having at least two different shapes and/or at least two different sizes for enhancing emission or absorption of radiation (21; 22) at two or more different wavelengths which lie in a range of 2 to 15 μm.