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1. (WO2018065251) MULTI-LAYER MIRROR FOR REFLECTING EUV RADIATION, AND METHOD FOR PRODUCING THE SAME

Pub. No.:    WO/2018/065251    International Application No.:    PCT/EP2017/074231
Publication Date: Fri Apr 13 01:59:59 CEST 2018 International Filing Date: Tue Sep 26 01:59:59 CEST 2017
IPC: G02B 5/08
G21K 1/06
Applicants: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E. V.
Inventors: NAUJOK, Philipp
YULIN, Sergiy
KAISER, Norbert
Title: MULTI-LAYER MIRROR FOR REFLECTING EUV RADIATION, AND METHOD FOR PRODUCING THE SAME
Abstract:
The invention relates to a multi-layer mirror (10) for EUV radiation comprising a layer sequence (5) having a plurality of alternating first layers (1) and second layers (2), wherein the first layers (1) comprise lanthanum or a lanthanum compound, and the second layers (2) comprise boron. The second layers (2) are doped with carbon, wherein the substance amount fraction of carbon in the second layers (2) is 10% or less. The invention further relates to a method for producing the multi-layer mirror (10).