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1. (WO2018064983) GAS PHASE ETCHING APPARATUS AND GAS PHASE ETCHING EQUIPMENT

International Application Status
DateTitleViewDownload
15.12.2018International Application Status ReportHTML, PDF, XMLPDF, XML


Published International Application
DateTitleViewDownload
12.04.2018Initial Publication with ISR( (A1 15/2018))PDF (23p.)PDF (23p.), ZIP(XML + TIFFs), XML


Search and Examination-Related Documents
DateTitleViewDownload
12.04.2018(ISA/210) International Search ReportPDF (4p.)PDF (4p.), ZIP(XML + TIFFs)
12.04.2018Translation of the ISRPDF (2p.)PDF (2p.), ZIP(XML + TIFFs)
12.04.2018(ISA/237) Written Opinion of the International Searching AuthorityPDF (3p.)PDF (3p.), ZIP(XML + TIFFs)


Related Documents on file at the International Bureau
DateTitleViewDownload
01.05.2018(IB/308) Notice Informing the Applicant of the Communication of the International Application to the Designated OfficesPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
12.04.2018(IB/311) Notification Concerning Availability of Publication of the International ApplicationPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
12.04.2018(RO/105) Notification of the International Application Number and of the International Filing DatePDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
12.04.2018(IB/301) Notification of receipt of record copyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
12.04.2018Priority DocumentPDF (16p.)PDF (16p.), ZIP(XML + TIFFs)
12.04.2018(RO/101) Request formPDF (5p.)
12.04.2018(IB/304) Notification Concerning Submission or Transmittal of Priority DocumentPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
12.04.2018Power of AttorneyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
12.04.2018(ISA/202) Notification of Receipt of Search CopyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
12.04.2018Validation LogPDF (2p.)PDF (2p.), ZIP(XML + TIFFs)
12.04.2018Application Body as FiledPDF (18p.)PDF (18p.), ZIP(XML + TIFFs)