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1. (WO2018063632) THREE CAPACITOR STACK AND ASSOCIATED METHODS

Pub. No.:    WO/2018/063632    International Application No.:    PCT/US2017/048824
Publication Date: Fri Apr 06 01:59:59 CEST 2018 International Filing Date: Tue Aug 29 01:59:59 CEST 2017
IPC: H01G 4/38
H01G 4/30
Applicants: INTEL CORPORATION
Inventors: GOH, Eng Huat
SIR, Jiun Hann
CHUA, Han Kung
LIM, Min Suet
TEOH, Hoay Tien
Title: THREE CAPACITOR STACK AND ASSOCIATED METHODS
Abstract:
A three capacitor stack and associated methods are shown. An exemplary capacitor device may include a first capacitor stack that includes a first plurality of layers of reference electrodes interleaved with first capacitor electrodes, a second capacitor stack on the first capacitor stack that includes a second plurality of layers of reference electrodes interleaved with second capacitor electrodes, and a third capacitor stack on the second capacitor stack that includes a reference electrode and a third capacitor electrode. A respective layer of dielectric material is formed between the reference electrodes and the first capacitor electrodes, the second capacitor electrodes, and the third capacitor electrode.