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1. (WO2018063601) DIFFUSER WITH CORNER HCG

Pub. No.:    WO/2018/063601    International Application No.:    PCT/US2017/048262
Publication Date: Fri Apr 06 01:59:59 CEST 2018 International Filing Date: Thu Aug 24 01:59:59 CEST 2017
IPC: C23C 16/455
C23C 16/50
C23C 16/458
Applicants: APPLIED MATERIALS, INC.
Inventors: ZHAO, Lai
FURUTA, Gaku
CHOI, Soo Young
PARK, Beom Soo
Title: DIFFUSER WITH CORNER HCG
Abstract:
The present disclosure generally relates to a gas distribution plate for ensuring deposition uniformity. The gas distribution plate has multiple concave portions on the downstream side to ensure uniform deposition in corner regions of the processing chamber.