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1. (WO2018063213) METHODS OF FORMING FLEXURE BASED COOLING SOLUTIONS FOR PACKAGE STRUCTURES

Pub. No.:    WO/2018/063213    International Application No.:    PCT/US2016/054332
Publication Date: Fri Apr 06 01:59:59 CEST 2018 International Filing Date: Fri Sep 30 01:59:59 CEST 2016
IPC: H01L 23/367
H01L 23/373
H01L 25/065
H01L 23/00
Applicants: INTEL CORPORATION
Inventors: KUMAR, Siddarth
SAHASRABUDHE, Shubhada H.
SANE, Sandeep B.
TANDON, Shalabh
Title: METHODS OF FORMING FLEXURE BASED COOLING SOLUTIONS FOR PACKAGE STRUCTURES
Abstract:
Methods/structures of joining package structures are described. Those methods/structures may include a first side of a die disposed on a first side of a substrate, and a cooling structure on a second side of the die, wherein the cooling structure comprises a first section attached to the substrate, and a second section disposed on a second side of the die, wherein the first and second sections are separated by an opening in the cooling structure. The opening surrounds a portion of the second section, and at least one flexure beam structure connects the first and second sections.