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1. (WO2018062710) GROUND CLAMPING UNIT AND SUBSTRATE SUPPORT ASSEMBLY COMPRISING SAME
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2018/062710    International Application No.:    PCT/KR2017/009729
Publication Date: 05.04.2018 International Filing Date: 05.09.2017
IPC:
H01J 37/32 (2006.01), H01L 21/687 (2006.01), C23C 14/50 (2006.01), C23C 16/458 (2006.01), H01L 21/02 (2006.01)
Applicants: MICO CO., LTD. [KR/KR]; 100, Gongdan-ro Anseong-si Gyeonggi-do 17567 (KR)
Inventors: JUNG, Chul Ho; (KR).
CHOI, Jin Young; (KR).
LEE, Ju Sung; (KR)
Agent: LEE, Dong Gun; (KR)
Priority Data:
10-2016-0124546 28.09.2016 KR
20-2016-0005612 28.09.2016 KR
Title (EN) GROUND CLAMPING UNIT AND SUBSTRATE SUPPORT ASSEMBLY COMPRISING SAME
(FR) UNITÉ DE SERRAGE DE MASSE ET ASSEMBLAGE SUPPORT DE SUBSTRAT LA COMPRENANT
(KO) 접지 클램핑 유닛 및 이를 포함하는 기판 지지 어셈블리
Abstract: front page image
(EN)A ground clamping unit for grounding a hollow member having a hollow and a ground load mounted in the hollow comprises: a clamping body having a penetration groove so as to encompass an external part of the ground load; an elastic connection part elastically making contact with the inside of the hollow member in the hollow and connected to the clamping body; and a fastening part for fastening the elastic connection part to the clamping body. Therefore, the clamping unit can tightly and electrically connect the ground load and the hollow member.
(FR)Une unité de serrage de masse pour mettre à la terre un élément creux ayant un creux et une charge de masse montée dans le creux comprend : un corps de serrage ayant une rainure de pénétration de façon à englober une partie externe de la charge de masse; une partie de liaison élastique en contact élastique avec l'intérieur de l'élément creux dans le creux et reliée au corps de serrage; et une partie de fixation pour fixer la partie de liaison élastique au corps de serrage. Par conséquent, l'unité de serrage peut connecter étroitement et électriquement la charge de masse et l'élément creux.
(KO)중공이 형성된 중공 부재 및 상기 중공 내에 장착된 접지 로드를 접지시키는 접지 클램핑 유닛은 상기 접지 로드의 외각부를 감싸도록 관통홈이 구비된 클램핑 몸체, 상기 중공 내부에서 상기 중공 부재의 내측에 탄성적으로 접촉하며, 상기 클램핑 몸체에 연결된 탄성 연결부 및 상기 클램핑 몸체에 상기 탄성 연결부를 체결시키는 체결부를 포함한다. 이로써, 접지 클램핑 유닛이 접지 로드 및 중공 부재 사이를 견고하게 전기적으로 연결시킬 수 있다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)