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1. (WO2018062710) GROUND CLAMPING UNIT AND SUBSTRATE SUPPORT ASSEMBLY COMPRISING SAME

Pub. No.:    WO/2018/062710    International Application No.:    PCT/KR2017/009729
Publication Date: Fri Apr 06 01:59:59 CEST 2018 International Filing Date: Wed Sep 06 01:59:59 CEST 2017
IPC: H01J 37/32
H01L 21/687
C23C 14/50
C23C 16/458
H01L 21/02
Applicants: MICO CO., LTD.
주식회사 미코
Inventors: JUNG, Chul Ho
정철호
CHOI, Jin Young
최진영
LEE, Ju Sung
이주성
Title: GROUND CLAMPING UNIT AND SUBSTRATE SUPPORT ASSEMBLY COMPRISING SAME
Abstract:
A ground clamping unit for grounding a hollow member having a hollow and a ground load mounted in the hollow comprises: a clamping body having a penetration groove so as to encompass an external part of the ground load; an elastic connection part elastically making contact with the inside of the hollow member in the hollow and connected to the clamping body; and a fastening part for fastening the elastic connection part to the clamping body. Therefore, the clamping unit can tightly and electrically connect the ground load and the hollow member.