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1. (WO2018062153) ROBOT, CONTROL DEVICE FOR ROBOT, AND POSITION TEACHING METHOD FOR ROBOT
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Pub. No.: WO/2018/062153 International Application No.: PCT/JP2017/034693
Publication Date: 05.04.2018 International Filing Date: 26.09.2017
IPC:
H01L 21/677 (2006.01) ,B25J 9/22 (2006.01) ,B25J 13/08 (2006.01) ,G05B 19/42 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
9
Programme-controlled manipulators
16
Programme controls
22
Recording or playback systems
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
13
Controls for manipulators
08
by means of sensing devices, e.g. viewing or touching devices
G PHYSICS
05
CONTROLLING; REGULATING
B
CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19
Programme-control systems
02
electric
42
Recording and playback systems, i.e. in which the programme is recorded from a cycle of operations, e.g. the cycle of operations being manually controlled, after which this record is played back on the same machine
Applicants:
川崎重工業株式会社 KAWASAKI JUKOGYO KABUSHIKI KAISHA [JP/JP]; 兵庫県神戸市中央区東川崎町3丁目1番1号 1-1, Higashikawasaki-cho 3-chome, Chuo-ku, Kobe-shi, Hyogo 6508670, JP
Inventors:
後藤 博彦 GOTO, Hirohiko; --
吉田 哲也 YOSHIDA, Tetsuya; --
丹 治彦 TAN, Haruhiko; --
藤森 一夫 FUJIMORI, Kazuo; --
山下 雄大 YAMASHITA, Katsuhiro; --
住友 雅彦 SUMITOMO, Masahiko; --
Agent:
特許業務法人 有古特許事務所 PATENT CORPORATE BODY ARCO PATENT OFFICE; 兵庫県神戸市中央区東町123番地の1 貿易ビル3階 3rd Fl., Bo-eki Bldg., 123-1, Higashimachi, Chuo-ku, Kobe-shi, Hyogo 6500031, JP
Priority Data:
2016-18914828.09.2016JP
Title (EN) ROBOT, CONTROL DEVICE FOR ROBOT, AND POSITION TEACHING METHOD FOR ROBOT
(FR) ROBOT, DISPOSITIF DE COMMANDE DE ROBOT ET PROCÉDÉ D'ENSEIGNEMENT DE POSITION DE ROBOT
(JA) ロボット、ロボットの制御装置、及び、ロボットの位置教示方法
Abstract:
(EN) This robot control device is provided with: an image data acquisition unit which acquires image data, imaged by a camera, of a teaching substrate arranged in the target position of a substrate that is to be taught, and of the substrate placement area of a hand; a virtual substrate information generating unit which generates information about a virtual substrate virtually arranged on the substrate placement area in the image data; a distance information calculation unit which calculates information about the distance from the substrate placement area to the teaching substrate on the basis of the image data; an operation control unit which, on the basis of the information about the distance from the substrate placement area to the teaching substrate, controls operation of a robot arm such that the virtual substrate matches the teaching substrate; and a storage unit which stores, as teaching data, the position of the hand when matching is achieved.
(FR) La présente invention concerne un dispositif de commande de robot, comprenant : une unité d'acquisition de données d'image qui acquiert des données d'image, imagées par une caméra, d'un substrat d'enseignement disposé dans la position cible d'un substrat devant être enseigné, et de la zone de placement de substrat d'une main ; une unité de génération d'informations relatives à un substrat virtuel qui génère des informations relatives à un substrat virtuel agencé virtuellement sur la zone de placement de substrat dans les données d'image ; une unité de calcul d'informations relatives à la distance qui calcule des informations relatives à la distance de la zone de placement de substrat au substrat d'enseignement sur la base des données d'image ; une unité de commande de fonctionnement qui, sur la base des informations relatives à la distance de la zone de placement de substrat au substrat d'enseignement, commande le fonctionnement d'un bras de robot de sorte que le substrat virtuel corresponde au substrat d'enseignement ; et une unité de stockage qui stocke, en tant que données d'enseignement, la position de la main lorsque la mise en correspondance est réalisée.
(JA) ロボットの制御装置は、カメラにより撮影された、教示対象となる基板の目標位置に配置された教示用基板、及び、ハンドの基板載置部の画像データを取得する画像データ取得部と、画像データにおいて基板載置部に仮想的に配置された仮想基板の情報を生成する仮想基板情報生成部と、画像データに基づいて基板載置部から教示用基板までの距離情報を算出する距離情報算出部と、基板載置部から教示用基板までの距離情報に基づいて、仮想基板が教示用基板と一致するようにロボットアームの動作を制御する動作制御部と、一致したときのハンドの位置を教示データとして記憶する記憶部と、を備える。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)