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1. (WO2018061957) DIAGNOSTIC SYSTEM OF SUBSTRATE CONVEYANCE HAND
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Pub. No.: WO/2018/061957 International Application No.: PCT/JP2017/034016
Publication Date: 05.04.2018 International Filing Date: 21.09.2017
IPC:
H01L 21/677 (2006.01) ,B25J 13/08 (2006.01) ,B65G 49/06 (2006.01) ,B65G 49/07 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
677
for conveying, e.g. between different work stations
B PERFORMING OPERATIONS; TRANSPORTING
25
HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; HANDLES FOR HAND IMPLEMENTS; WORKSHOP EQUIPMENT; MANIPULATORS
J
MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
13
Controls for manipulators
08
by means of sensing devices, e.g. viewing or touching devices
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49
Conveying systems characterised by their application for specified purposes not otherwise provided for
05
for fragile or damageable materials or articles
06
for fragile sheets, e.g. glass
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
G
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
49
Conveying systems characterised by their application for specified purposes not otherwise provided for
05
for fragile or damageable materials or articles
07
for semiconductor wafers
Applicants:
川崎重工業株式会社 KAWASAKI JUKOGYO KABUSHIKI KAISHA [JP/JP]; 兵庫県神戸市中央区東川崎町3丁目1番1号 1-1, Higashikawasaki-cho 3-chome, Chuo-ku, Kobe-shi, Hyogo 6508670, JP
Inventors:
後藤 博彦 GOTO, Hirohiko; --
吉田 哲也 YOSHIDA, Tetsuya; --
丹 治彦 TAN, Haruhiko; --
藤森 一夫 FUJIMORI, Kazuo; --
山下 雄大 YAMASHITA, Katsuhiro; --
住友 雅彦 SUMITOMO, Masahiko; --
Agent:
特許業務法人 有古特許事務所 PATENT CORPORATE BODY ARCO PATENT OFFICE; 兵庫県神戸市中央区東町123番地の1 貿易ビル3階 3rd Fl., Bo-eki Bldg., 123-1, Higashimachi, Chuo-ku, Kobe-shi, Hyogo 6500031, JP
Priority Data:
2016-18915028.09.2016JP
Title (EN) DIAGNOSTIC SYSTEM OF SUBSTRATE CONVEYANCE HAND
(FR) SYSTÈME DE DIAGNOSTIC DE MAIN DE TRANSPORT DE SUBSTRAT
(JA) 基板搬送ハンドの診断システム
Abstract:
(EN) This diagnostic system, for diagnosing a substrate conveyance hand comprising a base part which is linked to a hand part of a robot arm, and a substrate holding part which is coupled to the base part and holds a substrate, is provided with: a camera which is fixed to the base part and images the substrate holding part; and a diagnostic device which acquires image information imaged by the camera and diagnoses the soundness of the substrate holding part on the basis of the image information.
(FR) L'invention concerne un système de diagnostic destiné à diagnostiquer une main de transport de substrat, comprenant une partie de base qui est reliée à une partie formant main d'un bras de robot, et une partie de maintien de substrat qui est couplée à la partie de base et qui maintient un substrat. Le système de diagnostic comprend : une caméra qui est fixée à la partie de base et qui capture des images de la partie de maintien de substrat ; et un dispositif de diagnostic qui acquiert des informations d'image soumises à un traitement d'image par la caméra et qui diagnostique le bon état de la partie de maintien de substrat en se basant sur les informations d'image.
(JA) ロボットアームの手先部に連結される基部と、基部と結合され、基板を保持する基板保持部とを備える基板搬送ハンドの診断システムが、基部に固定され、基板保持部を撮像するカメラと、カメラが撮像した画像情報を取得し、当該画像情報に基づいて基板保持部の健常性を診断する診断装置とを備える。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)