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1. (WO2018061945) MEASURING SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFACTURING METHOD

International Application Status
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22.08.2019International Application Status ReportHTML, PDF, XMLPDF, XML


Published International Application
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05.04.2018Initial Publication with ISR( (A1 14/2018))PDF (127p.)PDF (127p.), ZIP(XML + TIFFs), FullText


Search and Examination-Related Documents
DateTitleViewDownload
02.04.2019(IB/373) International Preliminary Report on Patentability Chapter IPDF (12p.)PDF (12p.), ZIP(XML + TIFFs)
04.02.2019English Translation of the Written Opinion of the International Searching AuthorityPDF (19p.)PDF (19p.), ZIP(XML + TIFFs)
05.04.2018Translation of the ISRPDF (6p.)PDF (6p.), ZIP(XML + TIFFs)
05.04.2018(ISA/210) International Search ReportPDF (6p.)PDF (6p.), ZIP(XML + TIFFs)
05.04.2018(ISA/237) Written Opinion of the International Searching AuthorityPDF (11p.)PDF (11p.), ZIP(XML + TIFFs)


Related Documents on file at the International Bureau
DateTitleViewDownload
02.04.2019(IB/373) English Translation of International Preliminary Report on Patentability Chapter IPDF (20p.)PDF (20p.), ZIP(XML + TIFFs)
02.04.2019(IB/326) Notification of Transmittal of Copies of International Preliminary Report on Patentability Chapter IPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
22.01.2019(IB/308) Notice Informing the Applicant of the Communication of the International Application to the Designated OfficesPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
24.04.2018(IB/308) Notice Informing the Applicant of the Communication of the International Application to the Designated OfficesPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
05.04.2018(IB/311) Notification Concerning Availability of Publication of the International ApplicationPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
05.04.2018Priority DocumentPDF (75p.)PDF (75p.), ZIP(XML + TIFFs)
05.04.2018(RO/101) Request formPDF (4p.)
05.04.2018(IB/301) Notification of receipt of record copyPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
05.04.2018(IB/304) Notification Concerning Submission or Transmittal of Priority DocumentPDF (1p.)PDF (1p.), ZIP(XML + TIFFs)
05.04.2018Application Body as FiledPDF (115p.)PDF (115p.), ZIP(XML + TIFFs)
International application as filed