Search International and National Patent Collections
|1. (WO2018061805) PIEZOELECTRIC TYPE MICROPHONE|
|Title:||PIEZOELECTRIC TYPE MICROPHONE|
A piezoelectric type microphone is provided with: a plate (10a); a support portion (10b) disposed around the plate (10a); a link portion (10c) connecting the plate (10a) and the support portion (10b) via two or more sides of the plate (10a); and a detection portion (20) in which a lower electrode (21), a piezoelectric film (22), and an upper electrode (23) are stacked in this order. The detection portion (20) is stacked on the link portion (10c). The flexion point of a cross-sectional deformation curve when the plate (10a) and the link portion (10c) are deformed by sound pressure is in an area in which the detection portion (20) is not stacked.