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1. (WO2018061805) PIEZOELECTRIC TYPE MICROPHONE

Pub. No.:    WO/2018/061805    International Application No.:    PCT/JP2017/033338
Publication Date: Fri Apr 06 01:59:59 CEST 2018 International Filing Date: Fri Sep 15 01:59:59 CEST 2017
IPC: H04R 17/02
H01L 41/113
H01L 41/187
Applicants: FUJIFILM CORPORATION
富士フイルム株式会社
Inventors: HISHINUMA, Yoshikazu
菱沼 慶一
NAONO, Takayuki
直野 崇幸
SANO, Takahiro
佐野 貴洋
Title: PIEZOELECTRIC TYPE MICROPHONE
Abstract:
A piezoelectric type microphone is provided with: a plate (10a); a support portion (10b) disposed around the plate (10a); a link portion (10c) connecting the plate (10a) and the support portion (10b) via two or more sides of the plate (10a); and a detection portion (20) in which a lower electrode (21), a piezoelectric film (22), and an upper electrode (23) are stacked in this order. The detection portion (20) is stacked on the link portion (10c). The flexion point of a cross-sectional deformation curve when the plate (10a) and the link portion (10c) are deformed by sound pressure is in an area in which the detection portion (20) is not stacked.