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1. (WO2018061338) DETECTING METHOD AND DETECTING DEVICE

Pub. No.:    WO/2018/061338    International Application No.:    PCT/JP2017/022172
Publication Date: Fri Apr 06 01:59:59 CEST 2018 International Filing Date: Fri Jun 16 01:59:59 CEST 2017
IPC: G01V 8/10
B05C 11/00
B05C 11/08
Applicants: SCREEN HOLDINGS CO., LTD.
株式会社SCREENホールディングス
Inventors: KAKUMA Hiroaki
角間 央章
SAKATA Kensuke
坂田 健典
Title: DETECTING METHOD AND DETECTING DEVICE
Abstract:
Provided is a technique for detecting whether or not a liquid drops during a non-supply period. In this detecting method are performed: an image capturing step in which, during a non-supply period in which supply of liquid to a target nozzle from among one or more nozzles is stopped, image capture is performed in such a way that an imaging field of view includes a dropping path of liquid dropping from an opening of the nozzle; and a detecting step of using the result of the image capturing performed in the image capturing step to detect whether or not liquid has dropped. By this means it is possible to detect whether or not liquid drops from the nozzle during the non-supply period in which supply of liquid to the target nozzle is stopped.