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|1. (WO2018061336) SUBSTRATE PLACEMENT STAGE, AND SUBSTRATE PLACEMENT STAGE FABRICATION METHOD|
|Applicants:||NHK SPRING CO., LTD.
|Title:||SUBSTRATE PLACEMENT STAGE, AND SUBSTRATE PLACEMENT STAGE FABRICATION METHOD|
Provided are a stage for precisely controlling the temperature of a substrate, and a method for fabricating the stage. Also provided are a film forming device having the stage, and a film processing device . The stage for placing a substrate comprises a base material, and a heater layer on the base material; the heater layer has a first insulating film, a heater wire over the first insulating film, and a second insulating film over the heater wire; and the heater wire contains at least one type of metal selected from tungsten, nickel, chromium, cobalt, and molybdenum.