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1. (WO2018061212) CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

Pub. No.:    WO/2018/061212    International Application No.:    PCT/JP2016/079166
Publication Date: Fri Apr 06 01:59:59 CEST 2018 International Filing Date: Sat Oct 01 01:59:59 CEST 2016
IPC: G03F 7/20
H05G 2/00
Applicants: GIGAPHOTON INC.
ギガフォトン株式会社
Inventors: ISHIHARA, Takanobu
石原 孝信
Title: CHAMBER DEVICE, TARGET GENERATION METHOD, AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Abstract:
[Problem] To prevent oxidation of molten tin in a chamber device that includes a chamber, and a target generation device for supplying tin, i.e., a target material, to a predetermined region in the chamber. [Solution] Disclosed is a chamber device that includes: a chamber (1); a target generation device that is provided with a tank section (32) for storing tin T, temperature variable devices (33, 38) for changing the temperature of the tin T in the tank section (32), a pressure regulator (31) for changing the pressure in the tank section (32), and a nozzle section (34) for jetting the liquid tin T; a gas supply source (40) for supplying a gas to the inside of the chamber (1), said gas containing hydrogen gas; an exhaust device (46) for releasing a gas from the inside of the chamber (1); and a control unit (2) for controlling target generation. The control unit (2) controls the exhaust device (46) such that the oxygen partial pressure in the chamber (1) is 4×10-5 Pa or lower.