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1. (WO2018059836) A SUBSTRATE, A SUBSTRATE HOLDER, A SUBSTRATE COATING APPARATUS, A METHOD FOR COATING THE SUBSTRATE AND A METHOD FOR REMOVING THE COATING

Pub. No.:    WO/2018/059836    International Application No.:    PCT/EP2017/071179
Publication Date: Fri Apr 06 01:59:59 CEST 2018 International Filing Date: Thu Aug 24 01:59:59 CEST 2017
IPC: G03F 7/16
B05D 1/18
C23C 16/455
H01L 21/687
Applicants: ASML NETHERLANDS B.V.
Inventors: ACHANTA, Satish
WELTERS, Wilhelmus, Jacobus, Johannes
SOETHOUDT, Abraham, Alexander
KAMMINGA, Jelmer, Mattheüs
LIEDECKE, Christian
Title: A SUBSTRATE, A SUBSTRATE HOLDER, A SUBSTRATE COATING APPARATUS, A METHOD FOR COATING THE SUBSTRATE AND A METHOD FOR REMOVING THE COATING
Abstract:
The present invention relates to a substrate (100), a substrate holder (200), a substrate coating apparatus (800, 801), a method for coating the substrate (100) and a method for removing the coating (102). A monomolecular layer (102) is applied to the backside (101) of the substrate or a clamp surface (201) of the substrate holder (200). The friction force between the substrate backside and the substrate is small when the substrate does not experience full clamping force (210). After loading the substrate (100) on the substrate holder (200) full clamping force (210) is exerted in order to fix the substrate. The clamping force causes local removal of the monomolecular layer (102), resulting in an increase of the friction force between the substrate (100) and the substrate holder (200).