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1. (WO2018059754) VIBRATION SENSOR AND METHOD FOR OPERATING A VIBRATION SENSOR

Pub. No.:    WO/2018/059754    International Application No.:    PCT/EP2017/066226
Publication Date: Fri Apr 06 01:59:59 CEST 2018 International Filing Date: Fri Jun 30 01:59:59 CEST 2017
IPC: G01F 23/296
G01H 11/08
Applicants: VEGA GRIESHABER KG
Inventors: DIETERLE, Levin
Title: VIBRATION SENSOR AND METHOD FOR OPERATING A VIBRATION SENSOR
Abstract:
The invention relates to a vibration sensor (1) comprising a membrane (5) that can be stimulated so as to oscillate by means of a piezoelectric drive (3), a mechanical oscillator (10) which is arranged on the membrane and has at least two eigenmodes (100, 110, 120, 130), and an electronic system for controlling the drive (3) and for evaluating oscillations detected by the drive (3), wherein the drive (3) comprises at least one piezoelectric element (7), the piezoelectric element (7) having at least four separately controllable sectors (71, 72, 73, 74).