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|1. (WO2018059359) OPTICAL MEASUREMENT DEVICE AND METHOD|
|Applicants:||SHANGHAI MICRO ELECTRONICS EQUIPMENT(GROUP) CO., LTD.
|Title:||OPTICAL MEASUREMENT DEVICE AND METHOD|
Provided is an optical measurement device, comprising a frame measurement unit capable of measuring the amount of deformation of an optical detection stage frame (2), and a correction module for correcting the position of a substrate stage (6) and/or the position of an optical detection unit (5) according to the amount of deformation of the optical detection stage frame (2), so as to solve the problem of an error of measurement of a mark position caused by frame deformation. Also provided is an optical measurement method.