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1. (WO2018059359) OPTICAL MEASUREMENT DEVICE AND METHOD

Pub. No.:    WO/2018/059359    International Application No.:    PCT/CN2017/103233
Publication Date: Fri Apr 06 01:59:59 CEST 2018 International Filing Date: Tue Sep 26 01:59:59 CEST 2017
IPC: G01B 11/16
G03F 7/20
Applicants: SHANGHAI MICRO ELECTRONICS EQUIPMENT(GROUP) CO., LTD.
上海微电子装备(集团)股份有限公司
Inventors: YANG, Zhiyong
杨志勇
XU, Bing
徐兵
LI, Yuzhi
李煜芝
ZHOU, Chang
周畅
Title: OPTICAL MEASUREMENT DEVICE AND METHOD
Abstract:
Provided is an optical measurement device, comprising a frame measurement unit capable of measuring the amount of deformation of an optical detection stage frame (2), and a correction module for correcting the position of a substrate stage (6) and/or the position of an optical detection unit (5) according to the amount of deformation of the optical detection stage frame (2), so as to solve the problem of an error of measurement of a mark position caused by frame deformation. Also provided is an optical measurement method.