Search International and National Patent Collections

1. (WO2018059166) POSITIONING ASSEMBLY

Pub. No.:    WO/2018/059166    International Application No.:    PCT/CN2017/098863
Publication Date: Fri Apr 06 01:59:59 CEST 2018 International Filing Date: Fri Aug 25 01:59:59 CEST 2017
IPC: H01L 21/68
H01L 21/687
H01L 21/677
Applicants: TSINGHUA UNIVERSITY
清华大学
HWATSING TECHNOLOGY CO., LTD.
天津华海清科机电科技有限公司
Inventors: LU, Xinchun
路新春
ZHAO, Dewen
赵德文
XU, Zhenjie
许振杰
JIN, Fu
靳富
WANG, Tongqing
王同庆
LI, Kun
李昆
Title: POSITIONING ASSEMBLY
Abstract:
Disclosed is a positioning assembly (100) comprising: a support (10); and a plurality of positioning pins (20), the plurality of positioning pins (20) being arranged at intervals in the circumferential direction of the support (10), and being rotatably arranged on the support (10). Each positioning pin (20) comprises a positioning plate (21) for supporting a workpiece (40), with an upper surface of the positioning plate (21) being provided with a positioning boss (22), a lower surface of the positioning plate (21) being attached to an upper surface of the support (10) and being provided with a rotary shaft (23), and the central axis of the rotary shaft (23) not being coincident with the central axis of the positioning boss (22). The horizontal distance between the positioning bosses (22) can be changed by rotating the positioning pins (20), so as to effectively adjust the position of the workpiece (40).