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1. (WO2018057396) SPUTTERING SHOWERHEAD

Pub. No.:    WO/2018/057396    International Application No.:    PCT/US2017/051614
Publication Date: Fri Mar 30 01:59:59 CEST 2018 International Filing Date: Fri Sep 15 01:59:59 CEST 2017
IPC: C23C 14/34
C23C 14/22
C23C 14/56
C23C 14/14
C23C 14/08
H01J 37/34
Applicants: APPLIED MATERIALS, INC.
Inventors: SUBRAMANI, Anantha K.
GUNG, Tza-Jing
GOPALRAJA, Praburam
PONNEKANTI, Hari K.
Title: SPUTTERING SHOWERHEAD
Abstract:
In one implementation, a sputtering showerhead assembly is provided. The sputtering showerhead assembly comprises a faceplate comprising a sputtering surface comprising a target material and a second surface opposing the sputtering surface, wherein a plurality of gas passages extend from the sputtering surface to the second surface. The sputtering showerhead assembly comprises further comprises a backing plate positioned adjacent to the second surface of the faceplate. The backing plate comprises a first surface and a second surface opposing the first surface. The sputtering showerhead assembly has a plenum defined by the first surface of the backing plate and the second surface of the faceplate. The sputtering showerhead assembly comprises further comprises one or more magnetrons positioned along the second surface of the backing plate.