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1. (WO2018057071) PITCH/ROLL ANNULUS GYROSCOPE WITH SLANTED QUADRATURE TUNING ELECTRODES AND RELATED FABRICATION METHODS

Pub. No.:    WO/2018/057071    International Application No.:    PCT/US2017/036329
Publication Date: Fri Mar 30 01:59:59 CEST 2018 International Filing Date: Thu Jun 08 01:59:59 CEST 2017
IPC: H03H 9/13
H03H 9/02
H03H 3/007
H01L 41/29
H01L 41/047
H01L 41/18
H01L 41/331
H01L 41/332
G01C 19/5698
Applicants: GEORGIA TECH RESEARCH CORPORATION
Inventors: WEN, Haoran
AYAZI, Farrokh
DARUWALLA, Anosh
Title: PITCH/ROLL ANNULUS GYROSCOPE WITH SLANTED QUADRATURE TUNING ELECTRODES AND RELATED FABRICATION METHODS
Abstract:
A bulk acoustic wave resonator apparatus includes a resonator member having an annulus shape, and at least one anchor structure coupling the resonator member to a substrate. A perimeter of the resonator member is at least partially defined by respective sidewalls that are slanted at an angle relative to a plane defined by a surface of the resonator member. The surface of the resonator member may be defined by a (100) crystal plane, and the angle of the respective sidewalls may be defined by a (111) crystal plane. Related fabrication methods are also discussed.