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1. (WO2018055941) SURFACE TREATMENT COMPOSITION

Pub. No.:    WO/2018/055941    International Application No.:    PCT/JP2017/029003
Publication Date: Fri Mar 30 01:59:59 CEST 2018 International Filing Date: Thu Aug 10 01:59:59 CEST 2017
IPC: H01L 21/304
C11D 7/22
Applicants: FUJIMI INCORPORATED
株式会社フジミインコーポレーテッド
Inventors: CHEN, Jingzhi
陳 景智
Title: SURFACE TREATMENT COMPOSITION
Abstract:
[Problem] To provide a surface treatment composition which has both silico-silicon bonds and nitrogen-silicon bonds and which can treat the surface of an object to be polished with a polishing agent by sufficiently removing defects on the surface of said object to be polished with a polishing agent. [Solution] This surface treatment composition, which is used in surface treatment of an object to be polished with a polishing agent, includes silico-silicon bonds and nitrogen-silicon bonds, has a pH of less than 9.0 and contains: (A), a nonionic water-soluble polymer having a primary chain consisting exclusively of carbon atoms, or of carbon atoms and nitrogen atoms; and (B), an anionic water-soluble polymer which has a primary chain consisting exclusively of carbon atoms, and a side chain which is bonded to said primary chain consisting exclusively of carbon atoms and which has a sulfonic acid group or a group having a salt thereof, or a carboxylic group or a group having a salt thereof.