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1. (WO2018055414) BULK ACOUSTIC WAVE RESONATOR BASED SENSOR
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2018/055414    International Application No.:    PCT/GB2017/052866
Publication Date: 29.03.2018 International Filing Date: 25.09.2017
IPC:
G01N 29/02 (2006.01), B81B 7/00 (2006.01), B81C 1/00 (2006.01), G01N 29/036 (2006.01), H03H 9/17 (2006.01)
Applicants: THE UNIVERSITY OF WARWICK [GB/GB]; University House Coventry Warwickshire CV4 8UW (GB)
Inventors: COLE, Marina; (GB).
GARDNER, Julian; (GB)
Agent: PIOTROWICZ, Pawel; (GB).
JUMP, Timothy; (GB).
WALASKI, Jan; (GB).
GREY, Ian; (GB).
GILL, Siân; (GB).
DERRY, Paul; (GB).
ELEND, Almut; (GB).
HUTTER, Anton; (GB).
HEWETT, Jonathan; (GB).
HARRISON, Philip; (GB).
RUSSELL, Tim; (GB).
JOHNSON, Stephen; (GB).
BROWN, Alexander; (GB).
CHETTLE, John; (GB).
ANDERSON, Oliver; (GB).
HANDLEY, Matthew; (GB).
MAYS, Julie; (GB).
TAOR, Simon; (GB).
MCNAMARA, Kathryn; (GB).
CORK, Robert; (GB).
GILANI, Anwar; (GB).
MCDOUGALL, James; (GB).
SHELTON, Ruth; (GB).
JONES, Nicholas; (GB).
MCDOUGALL, Robert; (GB).
CLARK, Jonathan; (GB).
DAINTY, Katherine; (GB).
FLETCHER, Scott; (GB).
HUDSON, George; (GB).
JONES, Nicholas; (GB).
KENNEDY, Richard; (GB).
LEANSE, Thomas; (GB).
PETTY, Catrin; (GB).
SAYER, Robert; (GB)
Priority Data:
1616271.1 26.09.2016 GB
Title (EN) BULK ACOUSTIC WAVE RESONATOR BASED SENSOR
(FR) CAPTEUR À RÉSONATEUR À ONDES ACOUSTIQUES DE VOLUME
Abstract: front page image
(EN)An integrated circuit is disclosed. The integrated circuit comprise a silicon substrate (21), a sensor (6) comprising a bulk acoustic wave resonator (7) and an acoustic mirror (8) disposed between the bulk acoustic wave resonator and the substrate, and a CMOS circuit (16) supported by substrate and operatively connected to the sensor.
(FR)La présente invention concerne un circuit intégré. Ce circuit intégré comprend un substrat de silicium (21), un capteur (6) comprenant un résonateur à ondes acoustiques de volume (7) et un miroir acoustique (8) placé entre le résonateur à ondes acoustiques de volume et le substrat, ainsi qu'un circuit CMOS (16) supporté par un substrat et connecté de manière fonctionnelle au capteur.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)