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1. (WO2018054895) OPTICAL EXAMINATION DEVICE AND OPTICAL EXAMINATION METHOD WITH VISIBLE AND INFRARED LIGHT FOR SEMICONDUCTOR COMPONENTS

Pub. No.:    WO/2018/054895    International Application No.:    PCT/EP2017/073619
Publication Date: Fri Mar 30 01:59:59 CEST 2018 International Filing Date: Wed Sep 20 01:59:59 CEST 2017
IPC: G01N 21/95
Applicants: MUEHLBAUER GMBH & CO. KG
Inventors: PRAKAPENKA, Uladimir
SPICHTINGER, Stephan
MIEHLICH, Rainer
Title: OPTICAL EXAMINATION DEVICE AND OPTICAL EXAMINATION METHOD WITH VISIBLE AND INFRARED LIGHT FOR SEMICONDUCTOR COMPONENTS
Abstract:
An optical examination device (200) is suitable and designed to detect properties of a semiconductor component (2). It comprises a first illumination arrangement (4, 6), a second illumination arrangement (8, 10) and an imaging device (12, 14), the first illumination arrangement emitting infrared light onto a first surface of the semiconductor component, which faces away from the imaging device (camera). The infrared light fully penetrates the semiconductor component at least proportionally. The second illumination arrangement emits visible light onto a second surface of the semiconductor component, which faces the imaging device. The imaging device is designed and arranged to detect the light spectrum emitted from both the first and second illumination arrangement, and as a result of a subsequent image evaluation on the basis of both the visible and the infrared light spectrum, to provide a separate image reduction for determining property defects or damage of the semiconductor component.