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1. (WO2018053031) CONVOLUTIONAL NEURAL NETWORK-BASED MODE SELECTION AND DEFECT CLASSIFICATION FOR IMAGE FUSION

Pub. No.:    WO/2018/053031    International Application No.:    PCT/US2017/051405
Publication Date: Fri Mar 23 00:59:59 CET 2018 International Filing Date: Thu Sep 14 01:59:59 CEST 2017
IPC: H01L 21/66
Applicants: KLA-TENCOR CORPORATION
Inventors: BRAUER, Bjorn
Title: CONVOLUTIONAL NEURAL NETWORK-BASED MODE SELECTION AND DEFECT CLASSIFICATION FOR IMAGE FUSION
Abstract:
Systems and methods for classifying defects using hot scans and convolutional neural networks (CNNs) are disclosed. Primary scanning modes are identified by a processor and a hot scan of a wafer is performed. Defects of interest and nuisance data are selected and images of those areas are captured using one or more secondary scanning modes. Image sets are collected and divided into subsets. CNNs are trained using the image subsets. An ideal secondary scanning mode is determined and a final hot scan is performed. Defects are filtered and classified according to the final hot scan and the ideal secondary scanning mode CNN. Disclosed systems for classifying defects utilize image data acquisition subsystems such as a scanning electron microscope as well as processors and electronic databases.