Search International and National Patent Collections

1. (WO2018051595) IMAGING DEVICE AND ELECTRON BEAM EMITTING DEVICE

Pub. No.:    WO/2018/051595    International Application No.:    PCT/JP2017/022569
Publication Date: Fri Mar 23 00:59:59 CET 2018 International Filing Date: Tue Jun 20 01:59:59 CEST 2017
IPC: H01J 37/16
G21K 5/00
G21K 5/04
H01J 37/18
H01J 37/244
Applicants: TORAY ENGINEERING CO., LTD.
東レエンジニアリング株式会社
Inventors: SUZUKI, Kazuyoshi
鈴木 一嘉
OKUBO, Kenji
大久保 憲治
KAWASAKI, Kiyoshi
河▲崎▼ 喜代司
Title: IMAGING DEVICE AND ELECTRON BEAM EMITTING DEVICE
Abstract:
Provided is an imaging device that is capable of mitigating or preventing positional shifting and changes in the orientation of an imaging unit even when a chamber is deformed due to depressurization inside the chamber. Specifically, this imaging device, which is for imaging an object inside a depressurized atmosphere, is provided with a chamber, an imaging unit, a communication unit, and a reference frame that is disposed apart from the chamber and that has a rigid structure for securing the imaging unit in a predetermined orientation, wherein the communication unit is provided with an elastic air-tight holding unit that connects the imaging unit in an air-tight manner.