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|1. (WO2018051595) IMAGING DEVICE AND ELECTRON BEAM EMITTING DEVICE|
|Applicants:||TORAY ENGINEERING CO., LTD.
|Title:||IMAGING DEVICE AND ELECTRON BEAM EMITTING DEVICE|
Provided is an imaging device that is capable of mitigating or preventing positional shifting and changes in the orientation of an imaging unit even when a chamber is deformed due to depressurization inside the chamber. Specifically, this imaging device, which is for imaging an object inside a depressurized atmosphere, is provided with a chamber, an imaging unit, a communication unit, and a reference frame that is disposed apart from the chamber and that has a rigid structure for securing the imaging unit in a predetermined orientation, wherein the communication unit is provided with an elastic air-tight holding unit that connects the imaging unit in an air-tight manner.