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1. (WO2018050275) MICROSYSTEM DEVICE COMPRISING INTEGRATED DESICCANT MONITORING

Pub. No.:    WO/2018/050275    International Application No.:    PCT/EP2017/001066
Publication Date: Fri Mar 23 00:59:59 CET 2018 International Filing Date: Sat Sep 09 01:59:59 CEST 2017
IPC: G01N 25/56
G01M 3/16
H01L 23/26
Applicants: ALBERT-LUDWIGS-UNIVERSITÄT FREIBURG
RUDMANN, Linda
LANGENMAIR, Michael
ORDONEZ, Juan Sebastian
STIEGLITZ, Thomas
Inventors: RUDMANN, Linda
LANGENMAIR, Michael
ORDONEZ, Juan Sebastian
STIEGLITZ, Thomas
Title: MICROSYSTEM DEVICE COMPRISING INTEGRATED DESICCANT MONITORING
Abstract:
A miniaturized, microsystem device (1), comprising electrical and/or optical and/or mechanical components (3) in a housing (2, 6, 7) that is sealed or encapsulated against atmospheric humidity, contains a desiccant (5). The humidity-dependent service life of the device is determined by measuring the absorptivity (5) of the desiccant.