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1. (WO2018049175) MEMS ACTUATION SYSTEMS AND METHODS

Pub. No.:    WO/2018/049175    International Application No.:    PCT/US2017/050699
Publication Date: Fri Mar 16 00:59:59 CET 2018 International Filing Date: Sat Sep 09 01:59:59 CEST 2017
IPC: H05K 3/28
H04N 5/225
H04N 5/228
H05K 1/18
Applicants: MEMS DRIVE, INC.
Inventors: NG, Matthew
LIU, Xiaolei
WANG, Guiqin
Title: MEMS ACTUATION SYSTEMS AND METHODS
Abstract:
A method of manufacturing a micro-electrical-mechanical system (MEMS) assembly includes mounting a micro-electrical-mechanical system (MEMS) actuator to a metal plate. An image sensor assembly is mounted to the micro-electrical-mechanical system (MEMS) actuator. The image sensor assembly is electrically coupled to the micro-electrical-mechanical system (MEMS) actuator, thus forming a micro-electrical-mechanical system (MEMS) subassembly